Design and Fabrication of a MEMS 3D Micro-transformer for Low Frequency Applications

Design and fabrication of a 315 μΗ bondwire micro-transformer for ultra-low voltage energy harvesting

This paper presents a design study of a new topology for miniaturized bondwire transformers fabricated and assembled with standard IC bonding wires and toroidal ferrite (Fair-Rite 5975000801) as a magnetic core. The microtransformer realized on a PCB substrate, enables the build of magnetics on-top-of-chip, thus leading to the design of high power density components. Impedance measurements in a...

Microelectromechanical systems (MEMS): fabrication, design and applications

Micromachining and micro-electromechanical system (MEMS) technologies can be used to produce complex structures, devices and systems on the scale of micrometers. Initially micromachining techniques were borrowed directly from the integrated circuit (IC) industry, but now many unique MEMS-specific micromachining processes are being developed. In MEMS, a wide variety of transduction mechanisms ca...

MEMS-Based Micro Gas Chromatography: Design, Fabrication and Characterization

Design and fabrication of a 29 H bondwire micro-transformer with LTCC magnetic core on silicon for energy harvesting applications

This paper presents the design of a 1 : 50 bondwire micro-transformer assembled with IC gold bonding wires and a toroidal LTCC magnetic core with race-track shape. The transformer is fabricated on-top of a standard BCD IC in a 15 mm footprint area for micro-power energy harvesting applications. Measurements show a secondary self-inductance up to 29 μH with a maximum Q-factor of 11.6 at 1.3 MHz,...

MEMS Electrostatic Micro-Power Generator for Low Frequency Operation

This paper describes the analysis, simulation and testing of a microengineered motion-driven power generator, suitable for application in sensors within or worn on the human body. Micro-generators capable of powering sensors have previously been reported, but these have required high frequency mechanical vibrations to excite a resonant structure. However, bodydriven movements are slow and irreg...